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Impact of ALD grown passivation layers on silicon nitride based integrated optics devices for very-near-infrared wavelengths

TitleImpact of ALD grown passivation layers on silicon nitride based integrated optics devices for very-near-infrared wavelengths
Publication TypeJournal Article
Year of Publication2014
AuthorsKhanna, A, Subramanian, AZ, Häyrinen, M, Selvaraja, SK, Verheyen, P, Van Thourhout, D, Honkanen, S, Lipsanen, H, Baets, R
JournalOptics Express
Volume22
Pagination5684–5692