Title | Impact of ALD grown passivation layers on silicon nitride based integrated optics devices for very-near-infrared wavelengths |
Publication Type | Journal Article |
Year of Publication | 2014 |
Authors | Khanna, A, Subramanian, AZ, Häyrinen, M, Selvaraja, SK, Verheyen, P, Van Thourhout, D, Honkanen, S, Lipsanen, H, Baets, R |
Journal | Optics Express |
Volume | 22 |
Pagination | 5684–5692 |
Research Area: