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Low-Loss Singlemode PECVD Silicon Nitride Photonic Wire Waveguides for 532-900 nm Wavelength Window Fabricated Within a CMOS Pilot Line

TitleLow-Loss Singlemode PECVD Silicon Nitride Photonic Wire Waveguides for 532-900 nm Wavelength Window Fabricated Within a CMOS Pilot Line
Publication TypeJournal Article
Year of Publication2013
AuthorsSubramanian, AZ, Neutens, P, Dhakal, A, Jansen, R, Claes, T, Rottenberg, X, Peyskens, F, Selvaraja, SK, Helin, P, Dubois, B, Leyssens, K, Severi, S, Deshpande, P, Baets, R, Van Dorpe, P
JournalPhotonics Journal, IEEE
Volume5
Pagination2202809