Title | Low-Loss Singlemode PECVD Silicon Nitride Photonic Wire Waveguides for 532-900 nm Wavelength Window Fabricated Within a CMOS Pilot Line |
Publication Type | Journal Article |
Year of Publication | 2013 |
Authors | Subramanian, AZ, Neutens, P, Dhakal, A, Jansen, R, Claes, T, Rottenberg, X, Peyskens, F, Selvaraja, SK, Helin, P, Dubois, B, Leyssens, K, Severi, S, Deshpande, P, Baets, R, Van Dorpe, P |
Journal | Photonics Journal, IEEE |
Volume | 5 |
Pagination | 2202809 |