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Mechanical solutions to problems in microsystems

TitleMechanical solutions to problems in microsystems
Publication TypeConference Paper
Year of Publication2012
AuthorsAnanthasuresh, GK
Conference NamePhysics and Technology of Sensors (ISPTS), 2012 1st International Symposium on
Date PublishedMarch

Microelectronics and microsystems technologies are distinguished from each other because of the moving mechanical entities, both solids and fluids. As the field of microsystems technology was developed primarily by researchers working originally in the microelectronics area, there is most often a leaning towards electrical and electronics side. Fabrication and materials processing too have received much attention in this field. Thus, it is very common in this field to see that problems are usually overcome by enhancing fabrication, materials, or electronics. However, it should not be forgotten that it is mechanics that is also central to microsystems technology. The purpose of this talk is to illustrate how mechanical approach can be used to solve some problems in microsystems.