| Title | Method for generating high order harmonic frequencies and MEMS resonator |
| Publication Type | Miscellaneous |
| Year of Publication | 2022 |
| Authors | Li, S-S, Pillai, G |
| Abstract | A method for generating high order harmonic frequencies includes: providing a piezoelectric resonant film; and inputting a driving signal with a single tone frequency for driving the piezoelectric resonant film to oscillate in a non-linear region so as to generate a plurality of high order harmonic frequencies. Therefore, the quantity of the high order harmonic frequencies can be adjusted by applying an electrical controlling method. |
