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A Micromachined Wideband In-plane Single-axis Capacitive Accelerometer with a Displacement-amplifying Compliant Mechanism

TitleA Micromachined Wideband In-plane Single-axis Capacitive Accelerometer with a Displacement-amplifying Compliant Mechanism
Publication TypeJournal Article
Year of Publication2014
AuthorsS., K, Ananthasuresh, GK
JournalMechanics-based design of Structures and Machines
Volume42
Pagination355–370
Research Area: 
MEMS/NEMS