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Ohmic contacts to pseudomorphic HEMTs with low contact resistance due to enhanced Ge penetration through AlGaAs layers

TitleOhmic contacts to pseudomorphic HEMTs with low contact resistance due to enhanced Ge penetration through AlGaAs layers
Publication TypeJournal Article
Year of Publication2008
AuthorsG Saravanan, S, K Bhat, M, Muraleedharan, K, Vyas, HP, Muralidharan, R, Pathak, AP
JournalSemicond. Sci. Technol.
Volume23
Pagination25019