| Title | Phase Noise Optimization of Piezoelectric Bulk Mode MEMS Oscillators Based on Phase Feedback in Secondary Loop |
| Publication Type | Conference Paper |
| Year of Publication | 2022 |
| Authors | Chang, C-Y, Pillai, G, Li, S-S |
| Conference Name | 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS) |
| Publisher | IEEE |
| Keywords | Conferences, Electric potential, Force, Micromechanical devices, Phase noise, Resonant frequency, Transducers |
| Abstract | This work investigates the phase noise (PN) performance optimization technique based on phase feedback scheme demonstrated by a 10MHz multiple-port piezoelectric support transducer oscillator. An additional phase-locked loop (PLL) is implemented on two distinct support transducers as a secondary loop to enable precise damping and stiffness control through force-feedback. A wide quality factor (Q) tuning range of up to 41 % (Q = 7,175 – 10,161) is attained within full force-feedback phase of 2π, thereby improving an overall PN performance by 7.1dB. Moreover, the amplitude of the feedback tuning voltage (Vi) is also a key to PN reduction, which features a 10.5dB/V improvement at 1kHz offset. This technique has proven its potential as a key architecture for future low phase noise oscillators and resonant sensors. |
| DOI | 10.1109/MEMS51670.2022.9699576 |
