| Title | Photonics Integrated PiezoMEMS-PipMEMS: A Scalable Hybrid Platform for Next-Generation MEMS |
| Publication Type | Journal Article |
| Year of Publication | 2020 |
| Authors | Mere, V, Tiwari, S, Dash, A, Kallaga, R, Naik, A, Pratap, R, Selvaraja, SKumar |
| Journal | IEEE Sensors Letters |
| Keywords | Gratings, Laser beams, Measurement by laser beam, Optical device fabrication, Optical resonators, optical waveguides, Sensors |
| Abstract | In this letter, we present a photonics integrated piezoMEMS (PipMEMS) platform for next-generation MEMS. We demonstrate on-chip optical transduction of a piezoMEMS structure. We use a heterogeneous 3D-bonding approach to integrate silicon photonics interrogator chip and lead–zirconate–titanate (PZT)-based MEMS device. We report on-chip measurements of three resonance modes of the PiezoMEMS beam that shows an excellent agreement with conventional laser Doppler vibrometer measurement. We also demonstrate measurement in a vacuum with one order of magnitude improvement in the quality factor of the fundamental resonance mode. |
| DOI | 10.1109/LSENS.2020.3042708 |
