| Title | Plasma Oxidized Suspended Core-Shell Nanostructures for High Performance Metal Oxide Gas sensors |
| Publication Type | Conference Paper |
| Year of Publication | 2019 |
| Authors | Benedict, S, Bhat, N |
| Conference Name | 2019 Electron Devices Technology and Manufacturing Conference (EDTM) |
| Publisher | IEEE |
| Keywords | Gas detectors, Metals, Nanostructures, oxidation, Plasmas, Temperature sensors |
| Abstract | We report on the novel technique of creating core-shell metal-metal oxide high performance gas sensors using plasma oxidation of a suspended metal thin film. We demonstrate that this technique is very generic by realizing Pt-PtOx and W-WOx nanostructured sensors. The optimization technique for plasma oxidation is elucidated. We also propose an improvisation technique to create nano discs on top of suspended core-shell metal-metal oxide sensor to further enhance the performance. |
| DOI | 10.1109/EDTM.2019.8731180 |
