| Title | A Pmut Integrated Microfluidic System for Volumetric Flow Rate Sensing |
| Publication Type | Conference Paper |
| Year of Publication | 2021 |
| Authors | Roy, K, Kalyan, K, Ashok, A, Shastri, V, Pratap, R |
| Conference Name | 2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) |
| Publisher | IEEE |
| Keywords | Actuators, Fabrication, Fluids, Micromechanical devices, Sensitivity, Transducers, Ultrasonic imaging |
| Abstract | We exhibit the design and fabrication of a linear array of single-celled dual-electrode piezoelectric micromachined ultrasound transducers (PMUTs) and integrate them with a microfluidic channel. The integrated device forms an independent platform to sense the resonant peak shift in a reasonably low volume of fluids. We subsequently pitch on a novel technique of volumetric flow rate sensing based on resonant frequency shift, thereby demonstrating the PMUT-microfluidic integrated device's potentiality as a volumetric flow rate sensor. The sensitivity of the device to volume flow rate sensing is reported to be 537 ms/μl/hr |
| DOI | 10.1109/Transducers50396.2021.9495576 |
