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Process control of cantilever deflection for sensor application based on optical waveguides

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TitleProcess control of cantilever deflection for sensor application based on optical waveguides
Publication TypeJournal Article
Year of Publication2013
AuthorsJiang, F, Keating, A, Martyniuk, M, Pratap, R, Faraone, L, Dell, JM
JournalJournal of Microelectromechanical Systems
Volume22
Research Area: 
MEMS/NEMS