| Title | On the Realization of Self-Sensing Piezoelectric MEMS Actuators |
| Publication Type | Conference Paper |
| Year of Publication | 2019 |
| Authors | Tiwari, S, Kumar, R, P Menon, K, Antony, JA, Dutta, S, Pratap, R |
| Conference Name | 2019 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS) |
| Publisher | IEEE |
| Keywords | Actuators, amplifiers, Electrodes, Frequency response, Resonant frequency, Robot sensing systems |
| Abstract | Three different configurations of self-sensing piezoelectric MEMS actuators are designed, fabricated, and tested with PZT as the active material. A two-port circular diaphragm resonator of radius 1000 μm, a cantilever of length 1000 μm and width-24 μm with two parallel top electrodes, and a four-legged resonator structure with a proof mass of total die size 1.6 mm × 3 mm are fabricated and characterized as self-sensing actuators without any cross-talk compensation. A comparison among the output signals reveals that the cantilever (without etching the PZT in between the two electrodes) and the four-legged resonator perform well as self-sensing actuators, while the two-port diaphragm resonator with large concentric top electrodes suffers from electrical cross-talk. A successful characterization of a self-sensing actuator with the common ground electrode (for cantilever) is being reported for the first time. Deflection values of as low as 1 nm could be easily resolved using the proof-mass resonator. The act of actuation is verified by directly measuring the motion with laser doppler vibrometry which cross-verifies the sensor signal produced by the piezoelectric layer. |
| DOI | 10.1109/MARSS.2019.8860944 |
