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A Semi-Analytical Model for Squeeze-Film Damping Including Rarefaction in a MEMS Torsion Mirror with Complex Geometry

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TitleA Semi-Analytical Model for Squeeze-Film Damping Including Rarefaction in a MEMS Torsion Mirror with Complex Geometry
Publication TypeJournal Article
Year of Publication2008
AuthorsPandey, AKumar, Pratap, R
JournalIOP Journal of Micromechanics and Microengineering
Volume18
Research Area: 
MEMS/NEMS