| Title | Silicon Photonics enabled on-chip Optical Readout of piezoMEMS Resonators |
| Publication Type | Conference Paper |
| Year of Publication | 2020 |
| Authors | Mere, V, Tiwari, S, Dash, A, Kallega, R, Naik, A, Pratap, R, Selvaraja, SKumar |
| Conference Name | 2020 IEEE Sensors |
| Publisher | IEEE |
| Keywords | Gratings, Laser beams, Measurement by laser beam, Optical device fabrication, Optical resonators, Optical sensors, System-on-chip |
| Abstract | In this paper, we present the first demonstration of a promising technology that enables integration of a PiezoMEMS device and on-chip optical read-out. We demonstrate sensor integration by bonding a PZT-based microbeam on a silicon photonics-based resonance interrogator. We report on-chip measurement of three resonance modes of PiezoMEMS beam. We find excellent agreement between on-chip photonics and conventional LDV measurement. We also demonstrate measurement in a vacuum with one-order improvement in the quality factor of the fundamental resonance mode |
| DOI | 10.1109/SENSORS47125.2020.9278816 |
