Title | In-situ Stress Measurements During MOCVD Growth of High Al-content AlGaN on SiC |
Publication Type | Journal Article |
Year of Publication | 2004 |
Authors | Acord, JD, Raghavan, S, Snyder, DW, Redwing, JM |
Journal | Journal of Crystal Growth |
Volume | 272 |
Pagination | 65–71 |