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In-situ Stress Measurements During MOCVD Growth of High Al-content AlGaN on SiC

TitleIn-situ Stress Measurements During MOCVD Growth of High Al-content AlGaN on SiC
Publication TypeJournal Article
Year of Publication2004
AuthorsAcord, JD, Raghavan, S, Snyder, DW, Redwing, JM
JournalJournal of Crystal Growth
Volume272
Pagination65–71