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Sputter-deposited PZT-on-Silicon electro-optic modulator

TitleSputter-deposited PZT-on-Silicon electro-optic modulator
Publication TypeConference Paper
Year of Publication2021
AuthorsSingh, S, Selvaraja, SKumar
Conference Name2021 IEEE Photonics Conference (IPC)
KeywordsConferences, Electrooptic modulators, Modulation, Optical ring resonators, silicon, sputtering, titanium compounds

We present for the first time sputter deposition of PZT -on-SOl for electro-optic modulation. We present material, electric and electro-optic characteristics of a thin-film PZT -on-silicon. We demonstrate DC electro-optic characteristics using a ring resonator with a shift of 12.5 pm/V.