| Title | Sputter-deposited PZT-on-Silicon electro-optic modulator |
| Publication Type | Conference Paper |
| Year of Publication | 2021 |
| Authors | Singh, S, Selvaraja, SKumar |
| Conference Name | 2021 IEEE Photonics Conference (IPC) |
| Publisher | IEEE |
| Keywords | Conferences, Electrooptic modulators, Modulation, Optical ring resonators, silicon, sputtering, titanium compounds |
| Abstract | We present for the first time sputter deposition of PZT -on-SOl for electro-optic modulation. We present material, electric and electro-optic characteristics of a thin-film PZT -on-silicon. We demonstrate DC electro-optic characteristics using a ring resonator with a shift of 12.5 pm/V. |
| DOI | 10.1109/IPC48725.2021.9592886 |
