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A Study of Pressure Dependent Squeeze Film Stiffness as a Resonance Modulator using Static and Dynamic Measurements

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TitleA Study of Pressure Dependent Squeeze Film Stiffness as a Resonance Modulator using Static and Dynamic Measurements
Publication TypeJournal Article
Year of Publication2015
AuthorsGodthi, V, K. Reddy, J, Pratap, R
JournalJournal of Microelectromechanical Systems
DOI10.1109/JMEMS.2015.2431633
Research Area: 
MEMS/NEMS