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Sub-nanometer linewidth uniformity in silicon nano-photonic waveguide devices using CMOS fabrication technology

TitleSub-nanometer linewidth uniformity in silicon nano-photonic waveguide devices using CMOS fabrication technology
Publication TypeJournal Article
Year of Publication2010
AuthorsSelvaraja, SK, Bogaerts, W, Dumon, P, Van Thourhout, D, Baets, R
JournalIEEE Journal on Selected Topics in Quantum Electronics
Volume16
Pagination316