Title | Sub-nanometer linewidth uniformity in silicon nano-photonic waveguide devices using CMOS fabrication technology |
Publication Type | Journal Article |
Year of Publication | 2010 |
Authors | Selvaraja, SK, Bogaerts, W, Dumon, P, Van Thourhout, D, Baets, R |
Journal | IEEE Journal on Selected Topics in Quantum Electronics |
Volume | 16 |
Pagination | 316 |