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A Torsional MEMS Varactor with Wide Dynamic Range and Low Actuation Voltage

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TitleA Torsional MEMS Varactor with Wide Dynamic Range and Low Actuation Voltage
Publication TypeJournal Article
Year of Publication2005
AuthorsVenkatesh, C, Patil, S, Bhat, N, Pratap, R
JournalSensors and Actuators A: Physical
Volume121
Research Area: 
MEMS/NEMS