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Characterization of border trap generation in rapid thermally annealed oxides deposited using silane chemistry

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TitleCharacterization of border trap generation in rapid thermally annealed oxides deposited using silane chemistry
Publication TypeJournal Article
Year of Publication1998
AuthorsBhat, N, Saraswat, KC
JournalJournal of Applied Physics
Pagination2722
Research Area: 
Electronics