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Charge trap generation in LPCVD oxides under high field stressing

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TitleCharge trap generation in LPCVD oxides under high field stressing
Publication TypeJournal Article
Year of Publication1996
AuthorsBhat, N, Apte, PP, Saraswat, KC
JournalIEEE Transactions on Electron Devices
Pagination554
Date Publishedapr
Research Area: 
Electronics