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Flexible phynox alloy with integrated piezoelectric thin film for micro actuation application

TitleFlexible phynox alloy with integrated piezoelectric thin film for micro actuation application
Publication TypeConference Paper
Year of Publication2012
AuthorsJoshi, S, Nayak, MM, Rajanna, K
Conference NameSensors, 2012 IEEE
Date PublishedOct
KeywordsActuators, AFM, atomic force microscopy, circular diaphragm, concave perspex, crystalline piezoelectric thin film deposition, crystallisation, d33 coefficient value measurement, deflection measurement, diaphragms, Films, flexible phynox alloy, frequency 100 Hz, II-VI semiconductors, integrated piezoelectric thin film, Micro actuator, micro pump, microactuator, microactuators, piezoelectric actuators, piezoelectric semiconductors, piezoelectric thin films, Piezoelectricity, RF reactive magnetron sputtering, scanning electron microscopy, SEM, semiconductor thin films, Sensors, size 1.25 mum, sputter deposition, sputtering, Substrates, thin film sensors, voltage 2 V, voltage 5 V, voltage 8 V, wide band gap semiconductors, X-ray diffraction, XRD, zinc compounds, Zinc oxide, ZnO, ZnO thin film

In this paper, we report on the application aspect of piezoelectric ZnO thin film deposited on flexible phynox alloy substrate. Highly crystalline piezoelectric ZnO thin films were deposited by RF reactive magnetron sputtering and were characterized by XRD, SEM, AFM analysis. Also, the effective d33 coefficient value measurement was performed. The actuator element is a circular diaphragm of phynox alloy on to which piezoelectric ZnO thin film was deposited. ZnO film deposited actuator element was firmly fixed inside a suitable concave perspex mounting designed specifically for micro actuation purpose. The actuator element was excited at different frequencies for the supply voltages of 2V, 5V and 8V. Maximum deflection of the ZnO film deposited diaphragm was measured to be 1.25 μm at 100 Hz for the supply voltage of 8V. The developed micro actuator has the potential to be used as a micro pump for pumping nano liters to micro liters of fluids per minute for numerous biomedical and aerospace applications.