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| Title | Polyreoxidation process step for suppressing edge direct tunneling through ultrathin gate oxides in NMOSFETs |
| Publication Type | Journal Article |
| Year of Publication | 2003 |
| Authors | Maitra, K, Bhat, N |
| Journal | Solid-State Electronics |
| Volume | 47 |
| Pagination | 15–17 |
| Date Published | jan |
Research Area: