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Structural and Electrical Characterization of Erbium Oxide Films Grown on Si(100) by Low-pressure Metalorganic Chemical Vapour Deposition

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TitleStructural and Electrical Characterization of Erbium Oxide Films Grown on Si(100) by Low-pressure Metalorganic Chemical Vapour Deposition
Publication TypeJournal Article
Year of Publication2003
AuthorsSingh, MP, Thakur, CS, Shalini, K, Bhat, N, Shivashankar, SA
JournalApplied Physics Letters
Date Publishedoct
Research Area: 
Electronics