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Thermomechanical characterization of surface-micromachined microheaters using in-line digital holography

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TitleThermomechanical characterization of surface-micromachined microheaters using in-line digital holography
Publication TypeJournal Article
Year of Publication2010
AuthorsJayaraman, B, Singh, VR, Asundi, A, Bhat, N, Hegde, GM
JournalMeasurement Science & Technology, IOP
Volume21
Pagination015301
Research Area: 
Electronics