| Title | Thin film anodized titania nanotubes-based oxygen sensor |
| Publication Type | Conference Paper |
| Year of Publication | 2014 |
| Authors | Viegas, AE, Chatterjee, D, Choudhury, TH, Raghavan, S, Bhat, N |
| Conference Name | Emerging Electronics (ICEE), 2014 IEEE 2nd International Conference on |
| Date Published | Dec |
| Keywords | ammonia, anodisation, Anodization, aqueous ammonia solution, Chemicals, deionized water, Films, gas sensors, nanosensors, nanotubes, O2, oxidation, oxidization, oxygen, Oxygen Sensor, post-anodization treatment, Sensitivity, structural modification, Substrates, temperature 125 degC, Temperature sensors, Thin Film, thin film anodized titania nanotube-based oxygen gas sensor, thin film sensors, TiO2, Titania, titanium compounds |
| Abstract | Anodized titania, synthesized on oxidized silicon substrate, has been used as oxygen gas sensor. The as-anodized films resulted in a sensitivity of 5756% at 125°C, when exposed to 100% oxygen. The gas-sensing performance of anodized films has been evaluated with post-anodization treatment in de-ionized water and aqueous ammonia solution. The sensitivity increases to 8646% and 16599%, with post-treatment in aqueous ammonia solution and de-ionized water, respectively. This is attributed to increase surface area and activation during the post- anodization treatment. The repeatability of sensor performance has also been evaluated, and it is observed that the de-ionized water treated film is unstable for repeated sensing, possibly due to some structural modifications. |
| DOI | 10.1109/ICEmElec.2014.7151130 |
