C. Y. Cheng, Dangi, A. , Ren, L. , Tiwari, S. , Benoit, R. R. , Qiu, Y. , Lay, H. S. , Agrawal, S. , Pratap, R. , Kothapalli, S. - R. , and , ,
“Thin Film PZT-Based PMUT Arrays for Deterministic Particle Manipulation”,
IEEE transactions on ultrasonics, ferroelectrics, and frequency control, vol. 66, pp. 1606–1615, 2019.